![]() 238000000926 separation method Methods 0.000 claims description 7.239000004065 semiconductor Substances 0.000 claims abstract description 18.238000004519 manufacturing process Methods 0.000 claims abstract description 24.239000000112 cooling gas Substances 0.000 title abstract description 6. ![]() Assignors: GAFF, KEITH, HOLLAND, JOHN PATRICK, KOZAKEVICH, FELIX, MARAKHTANOV, ALEXEI, Matyushkin, Alexander Priority to TW105133369A priority patent/TWI720033B/en Priority to KR1020160134848A priority patent/KR20170054240A/en Publication of US20170110356A1 publication Critical patent/US20170110356A1/en Priority to US16/101,358 priority patent/US11024532B2/en Application granted granted Critical Publication of US10083853B2 publication Critical patent/US10083853B2/en Priority to US17/334,639 priority patent/US11651991B2/en Status Active legal-status Critical Current Adjusted expiration legal-status Critical Links Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Application filed by Lam Research Corp filed Critical Lam Research Corp Priority to US14/887,166 priority Critical patent/US10083853B2/en Assigned to LAM RESEARCH CORPORATION reassignment LAM RESEARCH CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Original Assignee Lam Research Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Alexander Matyushkin Alexei Marakhtanov John Patrick Holland Keith Gaff Felix Kozakevich Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Granted Application number US14/887,166 Other versions US10083853B2 Google Patents US20170110356A1 - Electrostatic chuck design for cooling-gas light-up prevention US20170110356A1 - Electrostatic chuck design for cooling-gas light-up prevention
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